The Resource 22nd Annual BACUS Symposium on Photomask Technology : 1-4 October, 2002, Monterey, California, USA

22nd Annual BACUS Symposium on Photomask Technology : 1-4 October, 2002, Monterey, California, USA

Label
22nd Annual BACUS Symposium on Photomask Technology : 1-4 October, 2002, Monterey, California, USA
Title
22nd Annual BACUS Symposium on Photomask Technology : 1-4 October, 2002, Monterey, California, USA
Creator
Contributor
Contributor
Subject
Genre
Language
  • eng
  • eng
Cataloging source
PQKB
http://bibfra.me/vocab/relation/contentprovider
  • x4aL93Do1FQ
  • Tqn3ldq2AH8
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NmO5rw0UsRU
Dewey number
621.3815/31
Language note
English
LC call number
TK7874.S9435 2002
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Symposium on Photomask Technology
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  • Kimmel, Kurt R
  • Grenon, Brian J
  • Society of Photo Optical Instrumentation Engineers
  • BACUS (Technical group)
  • Symposium on Photomask Technology
Series statement
SPIE proceedings series 22nd Annual BACUS Symposium on Photomask Technology
http://library.link/vocab/subjectName
  • Integrated circuits
  • Microlithography
  • Electrical & Computer Engineering
  • Engineering & Applied Sciences
  • Electrical Engineering
Label
22nd Annual BACUS Symposium on Photomask Technology : 1-4 October, 2002, Monterey, California, USA
Instantiates
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001229230
  • (PQKBManifestationID)12484932
  • (PQKBTitleCode)TC0001229230
  • (PQKBWorkID)11179615
  • (PQKB)10935721
  • (EXLCZ)993460000000001281
Label
22nd Annual BACUS Symposium on Photomask Technology : 1-4 October, 2002, Monterey, California, USA
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001229230
  • (PQKBManifestationID)12484932
  • (PQKBTitleCode)TC0001229230
  • (PQKBWorkID)11179615
  • (PQKB)10935721
  • (EXLCZ)993460000000001281

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