The Resource Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States

Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States

Label
Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States
Title
Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States
Contributor
Contributor
Subject
Genre
Language
  • eng
  • eng
Cataloging source
PQKB
http://bibfra.me/vocab/relation/contentprovider
  • sVSigbDfbS4
  • YS1zoRj1nZ0
Dewey number
621.3815/31
Language note
English
LC call number
TK7872.M3.A48 2009
http://library.link/vocab/relatedWorkOrContributorName
  • La Fontaine, Bruno M
  • Schellenberg, F. M.
  • International SEMATECH
  • SPIE (Society)
Series statement
Proceedings of SPIE Alternative lithographic technologies
http://library.link/vocab/subjectName
  • Extreme ultraviolet lithography
  • Lithography, Electron beam
  • Microlithography
  • Masks (Electronics)
  • Electrical & Computer Engineering
  • Engineering & Applied Sciences
  • Electrical Engineering
Label
Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States
Instantiates
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001229571
  • (PQKBManifestationID)12474802
  • (PQKBTitleCode)TC0001229571
  • (PQKBWorkID)11185097
  • (PQKB)10807914
  • (EXLCZ)993460000000001659
Label
Alternative lithographic technologies : 24-26 February 2009, San Jose, California, United States
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001229571
  • (PQKBManifestationID)12474802
  • (PQKBTitleCode)TC0001229571
  • (PQKBWorkID)11185097
  • (PQKB)10807914
  • (EXLCZ)993460000000001659

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