The Resource Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

Label
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
Title
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
Contributor
Contributor
Subject
Genre
Language
  • eng
  • eng
Cataloging source
PQKB
http://bibfra.me/vocab/relation/contentprovider
  • 67_ZPNFvxNg
  • x4aL93Do1FQ
  • u1Go2DK6MMs
  • iUa7Z_Y_CtI
Dewey number
621.3815/31
Language note
English
LC call number
TA1660.C46 2000
http://library.link/vocab/relatedWorkOrContributorName
  • Burnett, David
  • Kimura, Shinâichiro.
  • Singh, Bhanwar
  • Kimura, Shiníchiro
  • American Vacuum Society
  • Society of Photo Optical Instrumentation Engineers
  • Electrochemical Society, Inc
  • Solid State Technology (Organization)
Series statement
SPIE proceedings series Challenges in process integration and device technology
http://library.link/vocab/subjectName
  • Integrated optics
  • Microlithography
  • Semiconductors
  • Optical interconnects
  • Microelectronics
  • Engineering & Applied Sciences
  • Applied Physics
Label
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
Instantiates
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001229800
  • (PQKBManifestationID)12531904
  • (PQKBTitleCode)TC0001229800
  • (PQKBWorkID)11195663
  • (PQKB)10302448
  • (EXLCZ)993460000000001925
Label
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001229800
  • (PQKBManifestationID)12531904
  • (PQKBTitleCode)TC0001229800
  • (PQKBWorkID)11195663
  • (PQKB)10302448
  • (EXLCZ)993460000000001925

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