The Resource Electron collisions with molecules in gases : applications to plasma diagnostics and modeling, edited by Mineo Kimura, Y. Itikawa, (electronic resource)

Electron collisions with molecules in gases : applications to plasma diagnostics and modeling, edited by Mineo Kimura, Y. Itikawa, (electronic resource)

Label
Electron collisions with molecules in gases : applications to plasma diagnostics and modeling
Title
Electron collisions with molecules in gases
Title remainder
applications to plasma diagnostics and modeling
Statement of responsibility
edited by Mineo Kimura, Y. Itikawa
Subject
Genre
Language
  • eng
  • eng
Summary
This series, established in 1965, is concerned with recent developments in the general area of atomic, molecular, and optical physics. The field is in a state of rapid growth, as new experimental and theoretical techniques are used on many old and new problems. Topics covered also include related applied areas, such asatmospheric science, astrophysics, surface physics, and laser physics. Articles are written by distinguished experts who are active in their research fields. The articles contain both relevant review material as well as detailed descriptions of important recent developments
Member of
Is Subseries of
Cataloging source
MiAaPQ
Dewey number
  • 530
  • 551.5
Illustrations
illustrations
Index
no index present
Language note
English
LC call number
QC173
LC item number
.A2543 2001
Literary form
non fiction
Nature of contents
dictionaries
Series statement
Advances in atomic, molecular, and optical physics
Series volume
44
http://library.link/vocab/subjectName
  • Molecules
  • Atoms
  • Optics
Label
Electron collisions with molecules in gases : applications to plasma diagnostics and modeling, edited by Mineo Kimura, Y. Itikawa, (electronic resource)
Instantiates
Publication
Note
Description based upon print version of record
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Contents
  • Front Cover; Advances in Atomic, Molecular and Optical Physics; Copyright Page; Contents; Contributors; Preface; Chapter 1. Mechanisms of Electron Transport in Electrical Discharges and Electron Collision Cross Sections; I. Introduction; II. Major Characteristics of Collisions and Reactions in Discharges and Plasmas; III. Cross Sections and Reaction Rate Constants of Atomic and Molecular Processes; IV. Measurements of Electron Collision Cross Sections and Illustrative Results; V. Measurements of Partial Cross Sections with the Use of the Appearance Potential in Mass Spectrometry
  • VI. Measurements of Cross Sections for the Production of Positive and Negative IonsVII. Outlook; VIII. Acknowledgments; IX. References; Chapter 2. Theoretical Consideration of Plasma-Processing Processes; I. Introduction; II. An Example of Electron-Molecule Scattering; III. Overview of Theoretical Framework; IV. Current Level of the Accuracy of Theoretical Approaches; V. Excited Species; VI. Perspective and Conclusion; VII. Acknowledgment; VIII. References; Chapter 3. Electron Collision Data for Plasma-Processing Gases; I. Introduction; II. Plasma-Processing Gases; III. Data Assessment
  • IV. Assessed Cross Sections and CoefficientsV. Boltzmann-Code-Generated Collision Cross-Section Sets; VI. Conclusions; VII. References; Chapter 4. Radical Measurements in Plasma Processing; I. Introduction; II. Summary of Recent Developments in Measurement Methods for Radicals in Plasma Processing; III. Details of in Situ Measurement Methods for Radicals in Processing Plasmas; IV. Representative Results of CFx and SiHx Radicals in Processing Plasmas; V. Conclusions; VI. References; Chapter 5. Radio-Frequency Plasma Modeling for Low-Temperature Processing; I. Introduction
  • II. Radio-Frequency Electron Transport TheoryIII. Modeling of Radio-Frequency Plasmas; IV. Conclusions; V. Acknowledgments; VI. References; Chapter 6. Electron Interactions with Excited Atoms and Molecules; I. Introduction; II. Electron Scattering from Excited Atoms; III. Electron-Impact Ionization of Excited Atoms; IV. Electron Scattering from Excited Molecules; V. Electron-Impact Ionization of Excited Molecules; VI. Electron Attachment to Excited Molecules; VII. Concluding Remarks; VIII. Acknowledgment; IX. Appendix A; X. References; Subject Index; Contents of Volumes in this Series
Dimensions
unknown
Extent
1 online resource (329 p.)
Form of item
online
Isbn
9781281046208
Media category
computer
Media type code
c
Specific material designation
remote
System control number
  • (EBL)313853
  • (OCoLC)476103991
  • (SSID)ssj0000294898
  • (PQKBManifestationID)11255417
  • (PQKBTitleCode)TC0000294898
  • (PQKBWorkID)10312660
  • (PQKB)10267072
  • (MiAaPQ)EBC313853
  • (EXLCZ)991000000000365078
Label
Electron collisions with molecules in gases : applications to plasma diagnostics and modeling, edited by Mineo Kimura, Y. Itikawa, (electronic resource)
Publication
Note
Description based upon print version of record
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Contents
  • Front Cover; Advances in Atomic, Molecular and Optical Physics; Copyright Page; Contents; Contributors; Preface; Chapter 1. Mechanisms of Electron Transport in Electrical Discharges and Electron Collision Cross Sections; I. Introduction; II. Major Characteristics of Collisions and Reactions in Discharges and Plasmas; III. Cross Sections and Reaction Rate Constants of Atomic and Molecular Processes; IV. Measurements of Electron Collision Cross Sections and Illustrative Results; V. Measurements of Partial Cross Sections with the Use of the Appearance Potential in Mass Spectrometry
  • VI. Measurements of Cross Sections for the Production of Positive and Negative IonsVII. Outlook; VIII. Acknowledgments; IX. References; Chapter 2. Theoretical Consideration of Plasma-Processing Processes; I. Introduction; II. An Example of Electron-Molecule Scattering; III. Overview of Theoretical Framework; IV. Current Level of the Accuracy of Theoretical Approaches; V. Excited Species; VI. Perspective and Conclusion; VII. Acknowledgment; VIII. References; Chapter 3. Electron Collision Data for Plasma-Processing Gases; I. Introduction; II. Plasma-Processing Gases; III. Data Assessment
  • IV. Assessed Cross Sections and CoefficientsV. Boltzmann-Code-Generated Collision Cross-Section Sets; VI. Conclusions; VII. References; Chapter 4. Radical Measurements in Plasma Processing; I. Introduction; II. Summary of Recent Developments in Measurement Methods for Radicals in Plasma Processing; III. Details of in Situ Measurement Methods for Radicals in Processing Plasmas; IV. Representative Results of CFx and SiHx Radicals in Processing Plasmas; V. Conclusions; VI. References; Chapter 5. Radio-Frequency Plasma Modeling for Low-Temperature Processing; I. Introduction
  • II. Radio-Frequency Electron Transport TheoryIII. Modeling of Radio-Frequency Plasmas; IV. Conclusions; V. Acknowledgments; VI. References; Chapter 6. Electron Interactions with Excited Atoms and Molecules; I. Introduction; II. Electron Scattering from Excited Atoms; III. Electron-Impact Ionization of Excited Atoms; IV. Electron Scattering from Excited Molecules; V. Electron-Impact Ionization of Excited Molecules; VI. Electron Attachment to Excited Molecules; VII. Concluding Remarks; VIII. Acknowledgment; IX. Appendix A; X. References; Subject Index; Contents of Volumes in this Series
Dimensions
unknown
Extent
1 online resource (329 p.)
Form of item
online
Isbn
9781281046208
Media category
computer
Media type code
c
Specific material designation
remote
System control number
  • (EBL)313853
  • (OCoLC)476103991
  • (SSID)ssj0000294898
  • (PQKBManifestationID)11255417
  • (PQKBTitleCode)TC0000294898
  • (PQKBWorkID)10312660
  • (PQKB)10267072
  • (MiAaPQ)EBC313853
  • (EXLCZ)991000000000365078

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