The Resource Fundamentals of microfabrication : the science of miniaturization, Marc J. Madou

Fundamentals of microfabrication : the science of miniaturization, Marc J. Madou

Label
Fundamentals of microfabrication : the science of miniaturization
Title
Fundamentals of microfabrication
Title remainder
the science of miniaturization
Statement of responsibility
Marc J. Madou
Creator
Subject
Language
eng
Action
committed to retain for EAST
Cataloging source
DLC
http://library.link/vocab/creatorName
Madou, Marc J
Illustrations
  • illustrations
  • plates
Index
index present
LC call number
TK7836
LC item number
.M33 2002
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/subjectName
  • Microelectronics
  • Integrated circuits
  • Microelectromechanical systems
  • Machining
  • Microelectronic packaging
  • Lasers
  • Microélectronique
  • Circuits intégrés
  • Usinage
  • Mise sous boîtier (Microélectronique)
  • Lasers
  • Integrated circuits
  • Lasers
  • Machining
  • Microelectromechanical systems
  • Microelectronic packaging
  • Microelectronics
  • Microeletrônica
  • Encapsulamento eletrônico
  • Laser (aplicações industriais)
  • Microélectronique
  • Circuit intégré
  • Microfabrication
  • Mise sous boîtier (Électronique)
  • Mikrofertigung
  • Fertigungstechnik
  • Lithographie <Halbleitertechnologie>
  • Mikrosystemtechnik
Label
Fundamentals of microfabrication : the science of miniaturization, Marc J. Madou
Instantiates
Publication
Bibliography note
Includes bibliographical references (p. 679-684) and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Lithography -- Pattern transfer with dry etching techniques -- Pattern transfer with additive techniques -- Wet bulk micromachining -- Surface micromachining -- LIGA and micromolding -- A comparison of miniaturization techniques : top-down and bottom-up manufacturing -- Modeling, brains, packaging, sample preparation, and substrate choice -- Scaling, actuators, and power in miniaturized systems -- Miniaturization applications -- Appendix A: Metrology techniques for MEMS -- Appendix B: Living book -- Appendix C: Si and SiO2 etch rates in KOH -- Appendix D: Genetics -- Appendix E: Suggested further reading -- Appendix F: MEMS companies -- Appendix G: Glossary
Dimensions
29 cm
Edition
2nd ed.
Extent
723 pages
Isbn
9780849308260
Lccn
2001043273
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
color illustrations
System control number
  • (OCoLC)47738670
  • (OCoLC)ocm47738670
Label
Fundamentals of microfabrication : the science of miniaturization, Marc J. Madou
Publication
Bibliography note
Includes bibliographical references (p. 679-684) and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Lithography -- Pattern transfer with dry etching techniques -- Pattern transfer with additive techniques -- Wet bulk micromachining -- Surface micromachining -- LIGA and micromolding -- A comparison of miniaturization techniques : top-down and bottom-up manufacturing -- Modeling, brains, packaging, sample preparation, and substrate choice -- Scaling, actuators, and power in miniaturized systems -- Miniaturization applications -- Appendix A: Metrology techniques for MEMS -- Appendix B: Living book -- Appendix C: Si and SiO2 etch rates in KOH -- Appendix D: Genetics -- Appendix E: Suggested further reading -- Appendix F: MEMS companies -- Appendix G: Glossary
Dimensions
29 cm
Edition
2nd ed.
Extent
723 pages
Isbn
9780849308260
Lccn
2001043273
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
color illustrations
System control number
  • (OCoLC)47738670
  • (OCoLC)ocm47738670

Subject

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