The Resource Fundamentals of microfabrication and nanotechnology, Marc J. Madou

Fundamentals of microfabrication and nanotechnology, Marc J. Madou

Label
Fundamentals of microfabrication and nanotechnology
Title
Fundamentals of microfabrication and nanotechnology
Statement of responsibility
Marc J. Madou
Title variation
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Creator
Subject
Language
eng
Summary
  • "Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors"--
  • "In Solid State Physics, Fluidics and Analytical Techniques in Micro- and Nanotechnology we lay the foundations for a qualitative and quantitative theoretical understanding of micro-and nano-electromechanical systems, i.e., MEMS and NEMS. In integrated circuits (ICs), MEMS and NEMS, silicon (Si) is still the substrate and construction material of choice"--
Assigning source
  • Provided by publisher
  • Provided by publisher
Cataloging source
DLC
http://library.link/vocab/creatorName
Madou, Marc J
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.M33 2012
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Nanoelectromechanical systems
  • Microfluidics
  • Solid state physics
  • TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS
  • TECHNOLOGY & ENGINEERING / Electronics / Microelectronics
  • SCIENCE / Solid State Physics
  • Microelectromechanical systems
  • Microfluidics
  • Nanoelectromechanical systems
  • Solid state physics
  • Nanotechnologie
  • Mikrofertigung
Label
Fundamentals of microfabrication and nanotechnology, Marc J. Madou
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Contents
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
Dimensions
29 cm.
Edition
3rd ed.
Extent
3 v.
Isbn
9781420055160
Isbn Type
(v. 3)
Lccn
2011014406
Other control number
848705
Other physical details
ill. (some col.)
System control number
  • (OCoLC)727047810
  • (OCoLC)ocn727047810
Label
Fundamentals of microfabrication and nanotechnology, Marc J. Madou
Publication
Bibliography note
Includes bibliographical references and index
Contents
V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
Dimensions
29 cm.
Edition
3rd ed.
Extent
3 v.
Isbn
9781420055160
Isbn Type
(v. 3)
Lccn
2011014406
Other control number
848705
Other physical details
ill. (some col.)
System control number
  • (OCoLC)727047810
  • (OCoLC)ocn727047810

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