The Resource Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor

Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor

Label
Handbook of microlithography, micromachining, and microfabrication
Title
Handbook of microlithography, micromachining, and microfabrication
Statement of responsibility
P. Rai-Choudhury, editor
Title variation
Microlithography, micromachining, and microfabrication
Contributor
Subject
Language
eng
Member of
Action
committed to retain for EAST
Cataloging source
DLC
Illustrations
illustrations
Index
index present
LC call number
TK7836
LC item number
.H3423 1997
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
Rai-Choudhury, P
Series statement
IEEE materials and devices series
Series volume
12
http://library.link/vocab/subjectName
  • Microlithography
  • Micromachining
  • Microfabrication
  • Microlithography
  • Micromachining
  • Microfabrication
  • Microfabrication
  • Microlithography
  • Micromachining
  • Microtechniek
  • Moleculaire nanotechnologie
  • Microlithografie
  • Microlithographie
  • Micro-usinage
  • Micro-fabrication
Label
Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor
Instantiates
Publication
Note
"SPIE Press monograph PM39."
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
v. 1. Microlithography -- v. 2. Micromachining and Microfabrication
Dimensions
26 cm.
Extent
2 volumes
Isbn
9780819423795
Isbn Type
(v. 2)
Lccn
96040237
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
System control number
  • (OCoLC)36126447
  • (OCoLC)ocm36126447
Label
Handbook of microlithography, micromachining, and microfabrication, P. Rai-Choudhury, editor
Publication
Note
"SPIE Press monograph PM39."
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
v. 1. Microlithography -- v. 2. Micromachining and Microfabrication
Dimensions
26 cm.
Extent
2 volumes
Isbn
9780819423795
Isbn Type
(v. 2)
Lccn
96040237
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
System control number
  • (OCoLC)36126447
  • (OCoLC)ocm36126447

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