The Resource High Permittivity Gate Dielectric Materials, edited by Samares Kar, (electronic resource)

High Permittivity Gate Dielectric Materials, edited by Samares Kar, (electronic resource)

Label
High Permittivity Gate Dielectric Materials
Title
High Permittivity Gate Dielectric Materials
Statement of responsibility
edited by Samares Kar
Creator
Contributor
Editor
Provider
Subject
Language
eng
Summary
"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects."
Member of
http://library.link/vocab/creatorName
Kar, Samares
Image bit depth
0
LC call number
  • TK7800-8360
  • TK7874-7874.9
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
SpringerLink
Series statement
Springer Series in Advanced Microelectronics,
Series volume
43
http://library.link/vocab/subjectName
  • Engineering
  • Electronics
  • Optical materials
  • Engineering
  • Electronics and Microelectronics, Instrumentation
  • Optical and Electronic Materials
  • Solid State Physics
  • Spectroscopy and Microscopy
  • Engineering, general
Label
High Permittivity Gate Dielectric Materials, edited by Samares Kar, (electronic resource)
Instantiates
Publication
Antecedent source
mixed
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
not applicable
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
Historical Perspectives -- High Mobility Channels -- Non-Volatile Memory -- Hafnium-Based Gate Dielectric Materials -- Lanthanum-Based High-K Gate Dielectric Materials -- Crystalline High-K Gate Dielectric Materials -- High-K Gate Dielectric Processing.- Metal Gate Electrodes -- Flat-Band/Threshold Voltage Control -- Interfaces and Defects -- Electrical Characterization and Parameter Extraction -- Non-Contact Metrology of High-K Gate Dielectrics -- Channel Mobility -- High-K Gate Dielectric Reliability Issues -- Bias Temperature Instability -- Integration Issues.
Dimensions
unknown
Extent
XXXII, 489 p. 325 illus., 168 illus. in color.
File format
multiple file formats
Form of item
electronic
Isbn
9783642365355
Level of compression
uncompressed
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other control number
10.1007/978-3-642-36535-5
Other physical details
online resource.
Quality assurance targets
absent
Reformatting quality
access
Specific material designation
remote
System control number
(DE-He213)978-3-642-36535-5
Label
High Permittivity Gate Dielectric Materials, edited by Samares Kar, (electronic resource)
Publication
Antecedent source
mixed
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
not applicable
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
Historical Perspectives -- High Mobility Channels -- Non-Volatile Memory -- Hafnium-Based Gate Dielectric Materials -- Lanthanum-Based High-K Gate Dielectric Materials -- Crystalline High-K Gate Dielectric Materials -- High-K Gate Dielectric Processing.- Metal Gate Electrodes -- Flat-Band/Threshold Voltage Control -- Interfaces and Defects -- Electrical Characterization and Parameter Extraction -- Non-Contact Metrology of High-K Gate Dielectrics -- Channel Mobility -- High-K Gate Dielectric Reliability Issues -- Bias Temperature Instability -- Integration Issues.
Dimensions
unknown
Extent
XXXII, 489 p. 325 illus., 168 illus. in color.
File format
multiple file formats
Form of item
electronic
Isbn
9783642365355
Level of compression
uncompressed
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other control number
10.1007/978-3-642-36535-5
Other physical details
online resource.
Quality assurance targets
absent
Reformatting quality
access
Specific material designation
remote
System control number
(DE-He213)978-3-642-36535-5

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