The Resource Introductory MEMS : fabrication and applications, Thomas M. Adams, Richard A. Layton

Introductory MEMS : fabrication and applications, Thomas M. Adams, Richard A. Layton

Label
Introductory MEMS : fabrication and applications
Title
Introductory MEMS
Title remainder
fabrication and applications
Statement of responsibility
Thomas M. Adams, Richard A. Layton
Creator
Contributor
Subject
Language
eng
Summary
This title is a practical introduction to MEMS for advanced undergraduate and graduate students. It introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques
Cataloging source
ITD
http://library.link/vocab/creatorName
Adams, Thomas M.
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.A33 2010
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
Layton, Richard A
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Electronic apparatus and appliances
  • Transducers
  • Electronic apparatus and appliances
  • Microelectromechanical systems
  • Transducers
  • MEMS
Label
Introductory MEMS : fabrication and applications, Thomas M. Adams, Richard A. Layton
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories
Dimensions
25 cm
Extent
xv, 444 pages
Isbn
9780387095103
Isbn Type
(acid-free paper)
Lccn
2009939153
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations (some color)
Publisher number
12102532
System control number
  • (OCoLC)535508588
  • (OCoLC)ocn535508588
Label
Introductory MEMS : fabrication and applications, Thomas M. Adams, Richard A. Layton
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories
Dimensions
25 cm
Extent
xv, 444 pages
Isbn
9780387095103
Isbn Type
(acid-free paper)
Lccn
2009939153
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations (some color)
Publisher number
12102532
System control number
  • (OCoLC)535508588
  • (OCoLC)ocn535508588

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