The Resource Laser chemical processing for microelectronics, edited by K.G. Ibbs, R.M. Osgood

Laser chemical processing for microelectronics, edited by K.G. Ibbs, R.M. Osgood

Label
Laser chemical processing for microelectronics
Title
Laser chemical processing for microelectronics
Statement of responsibility
edited by K.G. Ibbs, R.M. Osgood
Contributor
Subject
Language
eng
Member of
Cataloging source
DLC
Index
index present
LC call number
TK7874
LC item number
.L298 1989
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Ibbs, K. G
  • Osgood, R. M
http://library.link/vocab/subjectName
  • Integrated circuits
  • Lasers
  • Integrated circuits
  • Lasers
  • Lasers
  • Circuits intégrés
  • Laser
  • Laserchemie
  • Mikroelektronik
  • Photolithographie (Halbleitertechnologie)
Label
Laser chemical processing for microelectronics, edited by K.G. Ibbs, R.M. Osgood
Instantiates
Publication
Bibliography note
Includes bibliographies and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
24 cm.
Extent
172 pages
Isbn
9780521322546
Lccn
87035864
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
  • (OCoLC)17383921
  • (OCoLC)ocm17383921
Label
Laser chemical processing for microelectronics, edited by K.G. Ibbs, R.M. Osgood
Publication
Bibliography note
Includes bibliographies and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Dimensions
24 cm.
Extent
172 pages
Isbn
9780521322546
Lccn
87035864
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
  • (OCoLC)17383921
  • (OCoLC)ocm17383921

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