The Resource Lithography : main techniques, edited by Stefan Landis, (electronic resource)

Lithography : main techniques, edited by Stefan Landis, (electronic resource)

Label
Lithography : main techniques
Title
Lithography
Title remainder
main techniques
Statement of responsibility
edited by Stefan Landis
Contributor
Provider
Subject
Language
eng
Summary
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
Assigning source
Provided by publisher
Cataloging source
CaPaEBR
Illustrations
illustrations
Index
index present
LC call number
TK7872.M3
LC item number
L58 2011eb
Literary form
non fiction
Nature of contents
  • standards specifications
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Landis, Stefan
  • ebrary
http://library.link/vocab/subjectName
Microlithography
Label
Lithography : main techniques, edited by Stefan Landis, (electronic resource)
Instantiates
Publication
Note
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier
Bibliography note
Includes bibliographical references and index
Color
multicolored
Dimensions
unknown
Extent
xxv, 377 p.
Form of item
electronic
Other physical details
ill. (some col.)
Specific material designation
remote
System control number
  • (OCoLC)842854719
  • (CaPaEBR)ebr10671590
Label
Lithography : main techniques, edited by Stefan Landis, (electronic resource)
Publication
Note
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier
Bibliography note
Includes bibliographical references and index
Color
multicolored
Dimensions
unknown
Extent
xxv, 377 p.
Form of item
electronic
Other physical details
ill. (some col.)
Specific material designation
remote
System control number
  • (OCoLC)842854719
  • (CaPaEBR)ebr10671590

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