The Resource Mechanical microsensors, M. Elwenspoek, R.J. Wiergerink

Mechanical microsensors, M. Elwenspoek, R.J. Wiergerink

Label
Mechanical microsensors
Title
Mechanical microsensors
Statement of responsibility
M. Elwenspoek, R.J. Wiergerink
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
DLC
http://library.link/vocab/creatorDate
1948-
http://library.link/vocab/creatorName
Elwenspoek, M.
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.E49 2001
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1964-
http://library.link/vocab/relatedWorkOrContributorName
Wiegerink, Remco J.
http://library.link/vocab/subjectName
  • Detectors
  • Microelectromechanical systems
  • Transducers
  • Silicon
  • Micromachining
  • Transducteurs
  • Silicium
  • Micro-usinage
  • Detectors
  • Microelectromechanical systems
  • Micromachining
  • Silicon
  • Transducers
  • Capteurs (technologie)
  • Mikrosensor
  • Siliciumsensor
  • Mikromechanik
  • Halbleitertechnologie
Label
Mechanical microsensors, M. Elwenspoek, R.J. Wiergerink
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
  • Resonant sensors
  • Electronic interfacing
  • Packaging
  • Introduction
  • MEMS
  • Introduction ito silicon micromachining
  • Mechanics of membranes and beams
  • Principles of measuring mechanical quantities: transduction of deformation
  • Force and pressure sensors
  • Acceleration and angular rate sensors
  • Flow sensors
Dimensions
25 cm.
Extent
x, 295 pages
Isbn
9783540675822
Lccn
00057363
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
  • (OCoLC)44502457
  • (OCoLC)ocm44502457
Label
Mechanical microsensors, M. Elwenspoek, R.J. Wiergerink
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
  • Resonant sensors
  • Electronic interfacing
  • Packaging
  • Introduction
  • MEMS
  • Introduction ito silicon micromachining
  • Mechanics of membranes and beams
  • Principles of measuring mechanical quantities: transduction of deformation
  • Force and pressure sensors
  • Acceleration and angular rate sensors
  • Flow sensors
Dimensions
25 cm.
Extent
x, 295 pages
Isbn
9783540675822
Lccn
00057363
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
  • (OCoLC)44502457
  • (OCoLC)ocm44502457

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