The Resource Metrology, inspection, and process control for microlithography XXV : 28 February-3 March 2011, San Jose, [California], United States

Metrology, inspection, and process control for microlithography XXV : 28 February-3 March 2011, San Jose, [California], United States

Label
Metrology, inspection, and process control for microlithography XXV : 28 February-3 March 2011, San Jose, [California], United States
Title
Metrology, inspection, and process control for microlithography XXV : 28 February-3 March 2011, San Jose, [California], United States
Contributor
Contributor
Subject
Genre
Language
  • eng
  • eng
Cataloging source
PQKB
http://bibfra.me/vocab/relation/contentprovider
  • YS1zoRj1nZ0
  • NeTdrbHP9JU
Dewey number
003/.5
Language note
English
LC call number
TK7874.M43769 2011
http://library.link/vocab/relatedWorkOrContributorName
  • Raymond, Christopher J
  • SPIE (Society)
  • Nova Measuring Instruments Ltd
Series statement
Proceedings of SPIE Metrology, inspection, and process control for microlithography XXV
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
  • Microlithography
  • Process control
  • Electrical & Computer Engineering
  • Engineering & Applied Sciences
  • Electrical Engineering
Label
Metrology, inspection, and process control for microlithography XXV : 28 February-3 March 2011, San Jose, [California], United States
Instantiates
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0000629183
  • (PQKBManifestationID)12226428
  • (PQKBTitleCode)TC0000629183
  • (PQKBWorkID)10718130
  • (PQKB)11175880
  • (EXLCZ)993360000000364839
Label
Metrology, inspection, and process control for microlithography XXV : 28 February-3 March 2011, San Jose, [California], United States
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0000629183
  • (PQKBManifestationID)12226428
  • (PQKBTitleCode)TC0000629183
  • (PQKBWorkID)10718130
  • (PQKB)11175880
  • (EXLCZ)993360000000364839

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