The Resource Metrology, inspection, and process control for microlithography XIV : 28 February-2 March, 2000, Santa Clara, California

Metrology, inspection, and process control for microlithography XIV : 28 February-2 March, 2000, Santa Clara, California

Label
Metrology, inspection, and process control for microlithography XIV : 28 February-2 March, 2000, Santa Clara, California
Title
Metrology, inspection, and process control for microlithography XIV : 28 February-2 March, 2000, Santa Clara, California
Contributor
Contributor
Subject
Genre
Language
  • eng
  • eng
Cataloging source
PQKB
http://bibfra.me/vocab/relation/contentprovider
  • uKduZE55ygw
  • x4aL93Do1FQ
  • G0YD26kc9CU
  • sVSigbDfbS4
Dewey number
621.3815/31
Language note
English
LC call number
TK7874.M47 2000
http://library.link/vocab/relatedWorkOrContributorName
  • Sullivan, Neal T
  • Semiconductor Equipment and Materials International
  • Society of Photo Optical Instrumentation Engineers
  • Society of Photo-optical Instrumentation Engineers
  • International SEMATECH
Series statement
SPIE proceedings series Metrology, inspection, and process control for microlithography XIV
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
  • Microlithography
  • Process control
  • Electrical & Computer Engineering
  • Engineering & Applied Sciences
  • Electrical Engineering
Label
Metrology, inspection, and process control for microlithography XIV : 28 February-2 March, 2000, Santa Clara, California
Instantiates
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001231790
  • (PQKBManifestationID)12495261
  • (PQKBTitleCode)TC0001231790
  • (PQKBWorkID)11246319
  • (PQKB)10441773
  • (EXLCZ)993360000000361969
Label
Metrology, inspection, and process control for microlithography XIV : 28 February-2 March, 2000, Santa Clara, California
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001231790
  • (PQKBManifestationID)12495261
  • (PQKBTitleCode)TC0001231790
  • (PQKBWorkID)11246319
  • (PQKB)10441773
  • (EXLCZ)993360000000361969

Library Locations

  • African Studies LibraryBorrow it
    771 Commonwealth Avenue, 6th Floor, Boston, MA, 02215, US
    42.350723 -71.108227
  • Alumni Medical LibraryBorrow it
    72 East Concord Street, Boston, MA, 02118, US
    42.336388 -71.072393
  • Astronomy LibraryBorrow it
    725 Commonwealth Avenue, 6th Floor, Boston, MA, 02445, US
    42.350259 -71.105717
  • Fineman and Pappas Law LibrariesBorrow it
    765 Commonwealth Avenue, Boston, MA, 02215, US
    42.350979 -71.107023
  • Frederick S. Pardee Management LibraryBorrow it
    595 Commonwealth Avenue, Boston, MA, 02215, US
    42.349626 -71.099547
  • Howard Gotlieb Archival Research CenterBorrow it
    771 Commonwealth Avenue, 5th Floor, Boston, MA, 02215, US
    42.350723 -71.108227
  • Mugar Memorial LibraryBorrow it
    771 Commonwealth Avenue, Boston, MA, 02215, US
    42.350723 -71.108227
  • Music LibraryBorrow it
    771 Commonwealth Avenue, 2nd Floor, Boston, MA, 02215, US
    42.350723 -71.108227
  • Pikering Educational Resources LibraryBorrow it
    2 Silber Way, Boston, MA, 02215, US
    42.349804 -71.101425
  • School of Theology LibraryBorrow it
    745 Commonwealth Avenue, 2nd Floor, Boston, MA, 02215, US
    42.350494 -71.107235
  • Science & Engineering LibraryBorrow it
    38 Cummington Mall, Boston, MA, 02215, US
    42.348472 -71.102257
  • Stone Science LibraryBorrow it
    675 Commonwealth Avenue, Boston, MA, 02445, US
    42.350103 -71.103784
Processing Feedback ...