The Resource Microsensors, MEMS, and smart devices, Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim

Microsensors, MEMS, and smart devices, Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim

Label
Microsensors, MEMS, and smart devices
Title
Microsensors, MEMS, and smart devices
Statement of responsibility
Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
Creator
Contributor
Subject
Language
eng
Action
committed to retain for EAST
Cataloging source
DLC
http://library.link/vocab/creatorDate
1958-
http://library.link/vocab/creatorName
Gardner, J. W.
Illustrations
illustrations
Index
index present
LC call number
TK7875
LC item number
.G37 2001
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1943-
http://library.link/vocab/relatedWorkOrContributorName
  • Varadan, V. K.
  • Awadelkarim, Osama O
http://library.link/vocab/subjectName
  • Microelectromechanical systems
  • Detectors
  • Intelligent control systems
  • Detectors
  • Intelligent control systems
  • Microelectromechanical systems
  • Mikromechanik
  • Mikrosensor
  • Mikroelektronik
Label
Microsensors, MEMS, and smart devices, Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
  • Polysilicon Film Deposition
  • Pattern Transfer
  • The Lithographic Process
  • Mask Formation
  • Resist
  • Lift-off Technique
  • Etching Electronic Materials
  • Wet Chemical Etching
  • Dry Etching
  • Doping Semiconductors
  • Historical Development of Microelectronics
  • Diffusion
  • Ion Implantation
  • MEMS Materials and their Preparation
  • Atomic Structure and the Periodic Table
  • Atomic Bonding
  • Crystallinity
  • Metals
  • Physical and Chemical Properties
  • Metallisation
  • Semiconductors
  • Evolution of Microsensors
  • Semiconductors: Electrical and Chemical Properties
  • Semiconductors: Growth and Deposition
  • Ceramic, Polymeric, and Composite Materials
  • Standard Microelectronic Technologies
  • Wafer Preparation
  • Crystal Growth
  • Wafer Manufacture
  • Epitaxial Deposition
  • Monolithic Processing
  • Bipolar Processing
  • Evolution of MEMS
  • Characteristics of BJTs
  • MOS Processing
  • Characteristics of FETs
  • SOI CMOS Processing
  • Monolithic Mounting
  • Die Bonding and Wire Bonding
  • Tape-Automated Bonding
  • Flip TAB Bonding
  • Flip-Chip Mounting
  • Printed Circuit Board Technologies
  • Emergence of Micromachines
  • Solid Board
  • Flexible Board
  • Plastic Moulded
  • Hybrid and MCM Technologies
  • Thick Film
  • Multichip Modules
  • Ball Grid Array
  • Programmable Devices And ASICs
  • Silicon Micromachining: Bulk
  • Electronic Materials and Processing
  • Electronic Materials and their Deposition
  • Oxide Film Formation by Thermal Oxidation
  • Deposition of Silicon Dioxide and Silicon Nitride
Dimensions
25 cm
Extent
xvi, 503 pages
Isbn
9780471861096
Lccn
2001024353
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
  • (OCoLC)46538604
  • (OCoLC)ocm46538604
Label
Microsensors, MEMS, and smart devices, Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
  • Polysilicon Film Deposition
  • Pattern Transfer
  • The Lithographic Process
  • Mask Formation
  • Resist
  • Lift-off Technique
  • Etching Electronic Materials
  • Wet Chemical Etching
  • Dry Etching
  • Doping Semiconductors
  • Historical Development of Microelectronics
  • Diffusion
  • Ion Implantation
  • MEMS Materials and their Preparation
  • Atomic Structure and the Periodic Table
  • Atomic Bonding
  • Crystallinity
  • Metals
  • Physical and Chemical Properties
  • Metallisation
  • Semiconductors
  • Evolution of Microsensors
  • Semiconductors: Electrical and Chemical Properties
  • Semiconductors: Growth and Deposition
  • Ceramic, Polymeric, and Composite Materials
  • Standard Microelectronic Technologies
  • Wafer Preparation
  • Crystal Growth
  • Wafer Manufacture
  • Epitaxial Deposition
  • Monolithic Processing
  • Bipolar Processing
  • Evolution of MEMS
  • Characteristics of BJTs
  • MOS Processing
  • Characteristics of FETs
  • SOI CMOS Processing
  • Monolithic Mounting
  • Die Bonding and Wire Bonding
  • Tape-Automated Bonding
  • Flip TAB Bonding
  • Flip-Chip Mounting
  • Printed Circuit Board Technologies
  • Emergence of Micromachines
  • Solid Board
  • Flexible Board
  • Plastic Moulded
  • Hybrid and MCM Technologies
  • Thick Film
  • Multichip Modules
  • Ball Grid Array
  • Programmable Devices And ASICs
  • Silicon Micromachining: Bulk
  • Electronic Materials and Processing
  • Electronic Materials and their Deposition
  • Oxide Film Formation by Thermal Oxidation
  • Deposition of Silicon Dioxide and Silicon Nitride
Dimensions
25 cm
Extent
xvi, 503 pages
Isbn
9780471861096
Lccn
2001024353
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
  • (OCoLC)46538604
  • (OCoLC)ocm46538604

Library Locations

  • African Studies LibraryBorrow it
    771 Commonwealth Avenue, 6th Floor, Boston, MA, 02215, US
    42.350723 -71.108227
  • Alumni Medical LibraryBorrow it
    72 East Concord Street, Boston, MA, 02118, US
    42.336388 -71.072393
  • Astronomy LibraryBorrow it
    725 Commonwealth Avenue, 6th Floor, Boston, MA, 02445, US
    42.350259 -71.105717
  • Fineman and Pappas Law LibrariesBorrow it
    765 Commonwealth Avenue, Boston, MA, 02215, US
    42.350979 -71.107023
  • Frederick S. Pardee Management LibraryBorrow it
    595 Commonwealth Avenue, Boston, MA, 02215, US
    42.349626 -71.099547
  • Howard Gotlieb Archival Research CenterBorrow it
    771 Commonwealth Avenue, 5th Floor, Boston, MA, 02215, US
    42.350723 -71.108227
  • Mugar Memorial LibraryBorrow it
    771 Commonwealth Avenue, Boston, MA, 02215, US
    42.350723 -71.108227
  • Music LibraryBorrow it
    771 Commonwealth Avenue, 2nd Floor, Boston, MA, 02215, US
    42.350723 -71.108227
  • Pikering Educational Resources LibraryBorrow it
    2 Silber Way, Boston, MA, 02215, US
    42.349804 -71.101425
  • School of Theology LibraryBorrow it
    745 Commonwealth Avenue, 2nd Floor, Boston, MA, 02215, US
    42.350494 -71.107235
  • Science & Engineering LibraryBorrow it
    38 Cummington Mall, Boston, MA, 02215, US
    42.348472 -71.102257
  • Stone Science LibraryBorrow it
    675 Commonwealth Avenue, Boston, MA, 02445, US
    42.350103 -71.103784
Processing Feedback ...