The Resource Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany, Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe., (electronic resource)

Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany, Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe., (electronic resource)

Label
Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany
Title
Modeling aspects in optical metrology II
Title remainder
15-16 June 2009, Munich, Germany
Statement of responsibility
Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe.
Contributor
Subject
Genre
Language
  • eng
  • eng
Member of
Cataloging source
PQKB
Dewey number
681/.25
Illustrations
illustrations
Index
index present
Language note
English
LC call number
QC367.M6352 2009
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Bosse, Harald
  • Bodermann, Bernd
  • Silver, Richard M
  • SPIE Europe
Series statement
Proceedings of SPIE,
Series volume
v. 7390
http://library.link/vocab/subjectName
  • Optical measurements
  • Integrated circuits
  • Semiconductors
  • Optical measurements
  • Integrated circuits
  • Semiconductors
  • Physics
  • Physical Sciences & Mathematics
  • Light & Optics
Label
Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany, Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe., (electronic resource)
Instantiates
Publication
Note
Bibliographic Level Mode of Issuance: Monograph
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Extent
1 online resource (1 v. (various pagings) )
Form of item
online
Media category
computer
Media type code
  • c
Other physical details
ill. ;
System control number
  • (MH)012037618-0
  • (SSID)ssj0001231989
  • (PQKBManifestationID)12528813
  • (PQKBTitleCode)TC0001231989
  • (PQKBWorkID)11237163
  • (PQKB)10111860
  • (EXLCZ)993360000000364338
Label
Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany, Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe., (electronic resource)
Publication
Note
Bibliographic Level Mode of Issuance: Monograph
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Extent
1 online resource (1 v. (various pagings) )
Form of item
online
Media category
computer
Media type code
  • c
Other physical details
ill. ;
System control number
  • (MH)012037618-0
  • (SSID)ssj0001231989
  • (PQKBManifestationID)12528813
  • (PQKBTitleCode)TC0001231989
  • (PQKBWorkID)11237163
  • (PQKB)10111860
  • (EXLCZ)993360000000364338

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