The Resource Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes, by Nong Moon Hwang, (electronic resource)

Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes, by Nong Moon Hwang, (electronic resource)

Label
Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes
Title
Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes
Statement of responsibility
by Nong Moon Hwang
Creator
Contributor
Author
Provider
Subject
Language
eng
Summary
This book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD). Starting from the underlying principles of the low pressure synthesis of diamond films, it is shown that diamond growth occurs not by individual atoms but by charged nanoparticles. This newly-discovered growth mechanism turns out to be general to many CVD and some physical vapor deposition (PVD) processes. This non-classical crystallization is a new paradigm of crystal growth, with active research taking place on growth in solution, especially in biomineralization processes. Established understanding of the growth of thin films and nanostructures is based around processes involving individual atoms or molecules. According to the author’s research over the last two decades, however, the generation of charged gas phase nuclei is shown to be the rule rather than the exception in the CVD process, and charged gas phase nuclei are actively involved in the growth of films or nanostructures. This new understanding is called the theory of charged nanoparticles (TCN). This book describes how the non-classical crystallization mechanism can be applied to the growth of thin films and nanostructures in gas phase synthesis. Based on the author’s graduate lecture course, the book is aimed at senior undergraduate and graduate students and researchers in the field of thin film and nanostructure growth or crystal growth. It is hoped that a new understanding of the growth processes of thin films and nanostructures will reduce trial-and-error in research and in industrial fabrication processes
Member of
http://library.link/vocab/creatorName
Hwang, Nong Moon
Image bit depth
0
LC call number
  • QC176.8.S8
  • QC611.6.S9
  • QC176.84.S93
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
SpringerLink
Series statement
Springer Series in Surface Sciences,
Series volume
60
http://library.link/vocab/subjectName
  • Physics
  • Nanoscience
  • Nanoscience
  • Nanostructures
  • Semiconductors
  • Surfaces (Physics)
  • Interfaces (Physical sciences)
  • Thin films
  • Nanotechnology
  • Surfaces (Technology)
  • Physics
  • Surface and Interface Science, Thin Films
  • Surfaces and Interfaces, Thin Films
  • Nanoscale Science and Technology
  • Semiconductors
  • Nanotechnology
Label
Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes, by Nong Moon Hwang, (electronic resource)
Instantiates
Publication
Antecedent source
mixed
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
not applicable
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
1 Non-Classical Crystallization -- 2 Thermodynamics of Physical and Chemical Vapour Deposition -- 3 Nucleation -- 4 Growth -- 5 Diamond Synthesis at Low Pressure -- 6 Growth Mechanism of CVD Diamond -- 7 Growth Mechanism of CVD Silicon -- 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures -- 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser -- 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure -- 11 Deposition Behavior of Charged Nanoparticles -- 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles -- 13 Charge-Enhanced Kinetics -- 14 Implications and Applications.
Dimensions
unknown
Extent
XII, 332 p. 229 illus., 64 illus. in color.
File format
multiple file formats
Form of item
electronic
Isbn
9789401776165
Level of compression
uncompressed
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other control number
10.1007/978-94-017-7616-5
Other physical details
online resource.
Quality assurance targets
absent
Reformatting quality
access
Specific material designation
remote
System control number
(DE-He213)978-94-017-7616-5
Label
Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes, by Nong Moon Hwang, (electronic resource)
Publication
Antecedent source
mixed
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Color
not applicable
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Contents
1 Non-Classical Crystallization -- 2 Thermodynamics of Physical and Chemical Vapour Deposition -- 3 Nucleation -- 4 Growth -- 5 Diamond Synthesis at Low Pressure -- 6 Growth Mechanism of CVD Diamond -- 7 Growth Mechanism of CVD Silicon -- 8 Other Works Related to Non-Classical Crystallization of Thin Films and Nanostructures -- 9 Experimental Confirmation of Charged Nanoparticles during Atmospheric CVD Using Differential Mobility Analyser -- 10 Experimental Confirmation of Charged Nanoparticles at Low Pressure -- 11 Deposition Behavior of Charged Nanoparticles -- 12 Bias Effect on Deposition Behaviour of Charged Nanoparticles -- 13 Charge-Enhanced Kinetics -- 14 Implications and Applications.
Dimensions
unknown
Extent
XII, 332 p. 229 illus., 64 illus. in color.
File format
multiple file formats
Form of item
electronic
Isbn
9789401776165
Level of compression
uncompressed
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other control number
10.1007/978-94-017-7616-5
Other physical details
online resource.
Quality assurance targets
absent
Reformatting quality
access
Specific material designation
remote
System control number
(DE-He213)978-94-017-7616-5

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