The Resource Optical microlithography X : 12-14 March, 1997, Santa Clara, California

Optical microlithography X : 12-14 March, 1997, Santa Clara, California

Label
Optical microlithography X : 12-14 March, 1997, Santa Clara, California
Title
Optical microlithography X : 12-14 March, 1997, Santa Clara, California
Contributor
Contributor
Subject
Language
  • eng
  • eng
Cataloging source
PQKB
http://bibfra.me/vocab/relation/contentprovider
  • G0YD26kc9CU
  • x4aL93Do1FQ
  • Nm-R6N7KbLM
  • uKduZE55ygw
Dewey number
621.3815/31
Language note
English
LC call number
TK7835.O662 1997
http://library.link/vocab/relatedWorkOrContributorName
  • Fuller, Gene E
  • Society of Photo-optical Instrumentation Engineers
  • Society of Photo Optical Instrumentation Engineers
  • SEMATECH (Organization)
  • Semiconductor Equipment and Materials International
Series statement
SPIE proceedings series Optical microlithography X
http://library.link/vocab/subjectName
  • Microlithography
  • Integrated circuits
  • X-ray lithography
  • Manufacturing processes
  • Electrical & Computer Engineering
  • Engineering & Applied Sciences
  • Electrical Engineering
Label
Optical microlithography X : 12-14 March, 1997, Santa Clara, California
Instantiates
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001232654
  • (PQKBManifestationID)12397053
  • (PQKBTitleCode)TC0001232654
  • (PQKBWorkID)11247315
  • (PQKB)11107372
  • (EXLCZ)993360000000361201
Label
Optical microlithography X : 12-14 March, 1997, Santa Clara, California
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
cr
Content category
text
Content type code
txt
Form of item
online
Media category
computer
Media type code
c
System control number
  • (SSID)ssj0001232654
  • (PQKBManifestationID)12397053
  • (PQKBTitleCode)TC0001232654
  • (PQKBWorkID)11247315
  • (PQKB)11107372
  • (EXLCZ)993360000000361201

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