The Resource Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA

Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA

Label
Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA
Title
Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA
Contributor
Contributor
Subject
Genre
Language
  • eng
  • eng
Cataloging source
PQKB
http://bibfra.me/vocab/relation/contentprovider
  • wnV9GxPBBbQ
  • FdtBH5_H7QI
Language note
English
LC call number
TK7874.P754 2003
http://library.link/vocab/relatedWorkOrContributorName
  • Tobin, Kenneth W
  • Emami, Iraj
  • Society of Photo Optical Instrumentation Engineers
  • Society of Photo-optical Instrumentation Engineers
Series statement
SPIE proceedings series Process and materials characterization and diagnostics in IC manufacturing
http://library.link/vocab/subjectName
  • Integrated circuits
  • Integrated circuits
  • Semiconductors
  • Semiconductor wafers
  • Integrated circuits industry
  • Quality control
  • Electrical & Computer Engineering
  • Engineering & Applied Sciences
  • Electrical Engineering
Label
Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA
Instantiates
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Form of item
online
Media category
computer
Media type code
  • c
System control number
  • (SSID)ssj0001233426
  • (PQKBManifestationID)12498436
  • (PQKBTitleCode)TC0001233426
  • (PQKBWorkID)11181817
  • (PQKB)10772946
  • (EXLCZ)993360000000362825
Label
Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA
Note
Bibliographic Level Mode of Issuance: Monograph
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Form of item
online
Media category
computer
Media type code
  • c
System control number
  • (SSID)ssj0001233426
  • (PQKBManifestationID)12498436
  • (PQKBTitleCode)TC0001233426
  • (PQKBWorkID)11181817
  • (PQKB)10772946
  • (EXLCZ)993360000000362825

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